Fundamentals of Scanning Electron Microscopy and
2011-6-2u2002·u2002• Plan view & cross-section specimens † Plan view: thin film on the substrate 100 Pm <10Pm 100 Pm <10Pm NFMC Spring School on Electron Microscopy, April 2011 Step 5: Final thinning of the disk † Electropolishing † Ion Milling Ç NFMC Spring School on Electron Microscopy, April 2011
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